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US9072 Series Silicon Pressure Sensor Die
Specification
Type of pressure | Absolute type or gauge type |
Dimension | 1.5mm �� 1.5mm �� 1.1mm |
Pressure medium | Air or non-corrosive gas |
| Min | Nominal | Max | Unit |
Excitation Voltage | -- | 5 | 10 | V |
Excitation Current | -- | 1.00 | 2.00 | mA |
Bridge Impedance | 4 | 5 | 6 | k�� |
Span1 |
|
|
|
|
60psi | 75 | 100 | 125 | mV |
100psi | 75 | 100 | 125 | mV |
300psi | 120 | 150 | 180 | mV |
800psi | 170 | 200 | 230 | mV |
1200psi | 260 | 300 | 340 | mV |
Offset | -30 | ��10 | +30 | mV |
TC Span2 | -0.17 | -0.22 | -0.27 | %FS/�� |
TC Offset2 | -0.08 | -0.02 | +0.08 | %FS/�� |
Linearity3 | -0/3 | ��0.05 | +0.3 | %FS |
Hysteresis | -0.3 | ��0.1 | +0.3 | %FS |
Proof pressure |
|
| 2x | Rated Fs |
Burst pressure4 |
|
| 3x | Rated Fs |
Operating Temperature | -40 |
| +125 | �� |
Storage Temperature | -55 |
| +150 | �� |
1��Unless otherwise specified, span is measured at 5.0V Constant Voltage supply at 25��. Sensor outputs a positive signal when diaphragm deflects downward. 2��Measured from 0�� to 50�� @ 5V Constant voltage excitation. 3��Defined as best straight line. 4��Maximum burst pressure up to 500psi for high pressure type (300psi) |
100PSI,
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Operating Pressure Range��0��150psiA
Over Pressure��0��750psiA
Zero Pressure Offset Voltage (before bonding)����15mV
Non-linearity����0.5%FS
Bridge Resistance��4500��5500��
Sensitivity��0.1/0.2/0.3 (Min/Typ/Max) mV/V/psi
Full Scale Span��100/150/200 (Min/Typ/Max) mV
Temperature coefficient of offset, TCO��
-70/-2.5/+65 (Min/Typ/Max) ?V/V /��C
Temperature coefficient of sensitivity, TCS��
16/23/29 (Min/Typ/Max) %FS/100��C
Temperature coefficient of resistance, TCR��
-13/-25/-37 (Min/Typ/Max) %FS/100��C
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